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Vacuum film formation method and device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Vacuum jacket for phase change memory element

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate

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Vacuum loadlock ultra violet bake for plasma etch

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Vacuum microelectronic devices with multiple planar electrodes

Semiconductor device manufacturing: process – Electron emitter manufacture
Patent

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Vacuum package fabrication of integrated circuit components

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Insulative housing or support
Reexamination Certificate

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Vacuum package fabrication of integrated circuit components

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor
Reexamination Certificate

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Vacuum package fabrication of microelectromechanical system...

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Assembly of plural semiconductive substrates each possessing...
Reexamination Certificate

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Vacuum packaged single crystal silicon device

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Vacuum packaged single crystal silicon device

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Vacuum packaged single crystal silicon device

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate

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Vacuum plasma processor method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Vacuum processing method and semiconductor device...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate

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Vacuum processing method and vacuum processing apparatus

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Vacuum processing system for producing components

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
Reexamination Certificate

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Vacuum sealed surface acoustic wave pressure sensor

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Assembly of plural semiconductive substrates each possessing...
Reexamination Certificate

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Vacuum-cavity MEMS resonator

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Vanishingly small integrated circuit diode

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Vapochromic LED

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Chemically responsive
Reexamination Certificate

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Vapor delivery system for solid precursors and method of...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Vapor deposition method and vapor deposition apparatus for...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
Reexamination Certificate

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