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Self-aligned tin formation by N.sub.2.sup.+ implantation during

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Self-aligned transistor and diode topologies in silicon...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned transparent metal oxide TFT on flexible substrate

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
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Self-aligned trench capacitor capping process for high...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned trench field effect transistors with regrown...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned trench field effect transistors with regrown...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned trench filling for narrow gap isolation regions

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Self-aligned trench MOSFET structure and method of manufacture

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned trench MOSFETs and methods for making the same

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned trench transistor using etched contact

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned trenched-channel lateral-current-flow transistor

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned tungsen etch back process to minimize seams in tung

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Self-aligned twin well process

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned twin well process

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned vertical combdrive actuator and method of...

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates – Thinning of semiconductor substrate
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Self-aligned vertical PNP transistor for high performance...

Semiconductor device manufacturing: process – Forming bipolar transistor by formation or alteration of...
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Self-aligned vertical PNP transistor for high performance...

Semiconductor device manufacturing: process – Forming bipolar transistor by formation or alteration of...
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Self-aligned via process for preventing poison via formation

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Self-aligned via structure and method of manufacture

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Self-aligned Vt implant

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having junction gate
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