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Oxidation method for altering a film structure

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Oxidation method for altering a film structure and CMOS...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Oxidation method for removing fluorine gas inside polysilicon du

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Oxidation method for semiconductor process

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Oxidation of silicon on germanium

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Oxidation of silicon using fluorine implant

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Oxidation process to improve polysilicon sidewall roughness

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Oxidation structure/method to fabricate a high-performance...

Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
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Oxidative conditioning method for metal oxide layer and...

Semiconductor device manufacturing: process – Making passive device – Stacked capacitor
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Oxide deglaze before sidewall oxidation of mesa or trench

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Oxide epitaxial isolation

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Oxide etch

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
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Oxide etch and method of etching

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Oxide etch barrier formed by nitridation

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Oxide etch process using a mixture of a fluorine-substituted hyd

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Oxide etch process with high selectivity to nitride suitable...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Oxide etch process with high selectivity to nitride suitable...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Oxide etch stop techniques for uniform damascene trench depth

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Oxide etching method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Oxide etching method and structures resulting from same

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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