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Micromachined gas-filled chambers and method of...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
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Micromachined ultrasonic transducers and method of fabrication

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
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Micromechanical actuator with multiple-plane comb electrodes...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Micromechanical capacitive transducer and method for...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Micromechanical component and appropriate manufacturing method

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Micromechanical component and manufacturing method

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Micromechanical component and method for fabricating a...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Micromechanical component and suitable method for its...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Micromechanical component as well as a method for producing...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Thermally responsive
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Micromechanical device and method for its production

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Micromechanical device and method of manufacture thereof

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Micromechanical device and method of manufacturing...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
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Micromechanical device latching

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Micromechanical device with thinned cantilever structure and...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Micromechanical diaphragm sensor having a double diaphragm

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Micromechanical semiconductor components and manufacturing metho

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Patent

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Micromechanical structural element having a diaphragm and...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Micromesh material and micromesh mono-crystal high frequency...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
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Micromesh material and micromesh mono-crystal high frequency...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
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Micromirror manufacturing method

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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