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Micromechanical capacitive transducer and method for...
Micromechanical component and appropriate manufacturing method
Micromechanical component and manufacturing method
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Micromechanical component and suitable method for its...
Micromechanical component as well as a method for producing...
Micromechanical device and method for its production
Micromechanical device and method of manufacture thereof
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Micromechanical diaphragm sensor having a double diaphragm
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Micromesh material and micromesh mono-crystal high frequency...
Micromirror manufacturing method