Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate
2011-07-05
2011-07-05
Vu, David (Department: 2829)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
C257SE29323
Reexamination Certificate
active
07972884
ABSTRACT:
An example of the present invention is a micromechanical device including, a substrate in which a signal line is provided, a micromachine which is mounted on the substrate, is formed of a conductive material into a beam-like shape, is elastically deformed by a function of an electric field in such a manner that the beam-like part moves closer to or apart from the signal line, and changes the electric characteristics concomitantly with the deformation, a deformation restraint section constituted of a material having a higher viscosity coefficient than the conductive material, provided on the opposite side of the micromachine to the signal line, for restraining deformation of the micromachine in a direction in which the micromachine is separated from the signal line, and a sealing body provided on the principal surface of the substrate, for covering the micromachine with a hollow section located therebetween.
REFERENCES:
patent: 7008812 (2006-03-01), Carley
patent: 2003/0034239 (2003-02-01), Chason et al.
patent: 2006/0065941 (2006-03-01), Delapierre
patent: 2005-207959 (2005-08-01), None
patent: 2006-60966 (2006-03-01), None
Inoue Michinobu
Miyagi Takeshi
Obata Susumu
Campbell Shaun
Kabushiki Kaisha Toshiba
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Vu David
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