Selective WSix deposition
Selectively coating bond pads
Self aligned channel implant, elevated S/D process by gate...
Self aligned contact pad in a semiconductor device and...
Self aligned contact plug technology
Self aligned double patterning flow with non-sacrificial...
Self aligned dual damascene method
Self aligned dual damascene process and structure with low paras
Self aligned dual inlaid patterning and etching
Self aligned gate
Self aligned metal interconnection and method of making the...
Self aligned silicide contact method of fabrication
Self aligned via dual damascene
Self aligned vias in dual damascene interconnect, buried...
Self sidewall aluminum fluoride, (SSWAF), protection
Self-aligned air-gap in interconnect structures
Self-aligned barrier formed with an alloy having at least...
Self-aligned barrier layers for interconnects
Self-aligned borderless contacts
Self-aligned cobalt silicide on MOS integrated circuits