Damascene process to eliminate copper defects during...
Damascene process with anti-reflection coating
Damascene processes for forming conductive structures
Damascene processing using a silicon carbide hard mask
Damascene structure and method of making
Damascene structure fabricated using a layer of...
Damascene structure fabricated using a layer of...
Damascene structure with reduced capacitance using a carbon nitr
Damascene T-gate using a spacer flow
Damascene wiring fabrication methods incorporating...
Damascene-type interconnection structure and its production...
Dark field image reversal for gate or line patterning
DC sputtering process for making smooth electrodes and thin...
De-fluoridation process
De-fluorination after via etch to preserve passivation
Decoupling capacitor for high frequency noise immunity
Decreasing metal-silicide oxidation during wafer queue time
Deep submicron metallization using deep UV photoresist
Deep submicron silicide blocking
Defect and etch rate control in trench etch for dual...