Self aligned vias in dual damascene interconnect, buried...
Self sidewall aluminum fluoride, (SSWAF), protection
Self-aligned air-gap in interconnect structures
Self-aligned barrier formed with an alloy having at least...
Self-aligned barrier layers for interconnects
Self-aligned borderless contacts
Self-aligned cobalt silicide on MOS integrated circuits
Self-aligned composite insulator with sub-half-micron multilevel
Self-aligned connection to underlayer metal lines through unland
Self-aligned contact areas for sidewall image transfer...
Self-aligned contact for closely spaced transistors
Self-aligned contact process
Self-aligned contact window
Self-aligned contact wiring process for SI devices
Self-aligned contacts for salicided MOS devices
Self-aligned contacts to source/drain silicon electrodes utilizi
Self-aligned copper interconnect architecture with enhanced copp
Self-aligned copper interconnect structure and method of manufac
Self-aligned copper silicide formation for improved...
Self-aligned dual damascene arrangement for metal interconnectio