Tantalum oxide film, use thereof, process for forming the...
Technique for forming an interlayer dielectric material of...
Technique for forming an oxide/nitride layer stack by...
Techniques for improving adhesion of silicon dioxide to titanium
Techniques for improving adhesion of silicon dioxide to...
Techniques for improving adhesion of silicon dioxide to...
Techniques for providing decoupling capacitance
Techniques promoting adhesion of porous low K film to...
Techniques to create low K ILD for BEOL
Technology for thermodynamically stable contacts for binary...
Temperature spike for uniform nitridization of ultra-thin...
Thermal activation of fluorine for use in a semiconductor...
Thermal compensation method for forming semiconductor...
Thermal CVD process for depositing a low dielectric constant...
Thermal nitrogen distribution method to improve uniformity...
Thermal oxidation method utilizing atomic oxygen to reduce...
Thermal processing furnace, gas delivery system therefor,...
Thermal treatment apparatus
Thermally conductive silk-screenable interface material
Thermally stable poly-Si/high dielectric constant material...