Method to improve water-barrier performance by changing film...

Method to mitigate impact of UV and E-beam exposure on...

Method to pattern polysilicon gates with high-k material...

Method to perform selective atomic layer deposition of zinc...

Method to produce a porous oxygen-silicon layer

Method to reduce PEB sensitivity of resist

Method to reduce photoresist pattern collapse by controlled...

Method using TEOS ramp-up during TEOS/ozone CVD for improved...

Methods and apparatus for aligning a set of patterns on a...

Methods and apparatus for E-beam treatment used to fabricate...

Methods and apparatus for forming a high dielectric film and...

Methods and apparatus for forming HDP-CVD PSG film used for adva

Methods and apparatus for forming thin films for...

Methods and apparatus for patterned deposition of...

Methods and apparatus for producing stable low k FSG film...

Methods and apparatus for treating a semiconductor substrate

Methods and materials for depositing films on semiconductor...

Methods for depositing premetal dielectric layer at sub-atmosphe

Methods for forming a dielectric film

Methods for forming a high dielectric film