4. Rotary kinetic fluid motors or pumps
  5. Smooth runner surface for working fluid frictional contact
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Turbo-molecular pump, substrate processing apparatus, and...

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Reexamination Certificate

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Turbo/drag pump having a composite skirt

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Reexamination Certificate

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Turbomolecular pump

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Reexamination Certificate

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Turbomolecular pump

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Patent

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Turbomolecular pump

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Patent

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Turbomolecular pump

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Patent

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Turbomolecular pump

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Reexamination Certificate

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Turbomolecular pump

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Reexamination Certificate

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Turbomolecular pump

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Patent

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Turbomolecular pump

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Reexamination Certificate

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Turbomolecular pump

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Patent

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Turbomolecular pump

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Patent

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Turbomolecular pump and vacuum apparatus

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Reexamination Certificate

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Turbomolecular pump having vanes with ceramic and metallic surfa

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Patent

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Turbomolecular pump with magnetic mounting

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Patent

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Turbomolecular pump with static charge control

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Reexamination Certificate

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Turbomolecular vacuum pump

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Patent

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Turbomolecular vacuum pump

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Patent

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Turbomolecular vacuum pump with a rotor and at least one antifri

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Patent

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Turbomolecular vacuum pumps with low susceptiblity to particulat

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Patent

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