Turbomolecular pump

Details Turbomolecular pump Turbomolecular pump

1977-12-19

1979-12-25

Casaregola, Louis J.

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

415111, F01D 136

Patent

active

041803701

ABSTRACT:
A turbomolecular pump employing as drive motor a pressure gas turbine the tput shaft of which is drivingly connected to a rotatable shaft journalled to pneumatic bearings and carrying the turbine rotor of the pump which rotor operates with the turbine stator fixedly connected to the pump housing. That part of the rotatable shaft which is remote from the pressure gas turbine passes through a seal including a magnetic sealing fluid which is magnetically held in its sealing position. The pump is furthermore provided with passages communicating with the pneumatic bearing and the seal for cooling the same and the adjacent rotor shaft area. The seal sealingly surrounding the adjacent rotor shaft portion seals this rotor shaft portion relative to the pneumatic bearings and relative to the vacuum chamber of the pump.

REFERENCES:
patent: 3399827 (1968-09-01), Schwartzman
patent: 3620584 (1971-11-01), Rosenweig
patent: 3740060 (1973-06-01), Miskolczy
patent: 3753623 (1973-08-01), Wutz
patent: 3969039 (1976-07-01), Shoulders
patent: 3969042 (1976-07-01), Bachler

Affiliated with

Also associated with

Rating

Turbomolecular pump does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Turbomolecular pump, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Turbomolecular pump will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2069069