Turbomolecular vacuum pumps with low susceptiblity to particulat

Details Turbomolecular vacuum pumps with low susceptiblity to particulat Turbomolecular vacuum pumps with low susceptiblity to particulat

1996-12-19

1998-01-20

Verdier, Christopher

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

4151212, 415143, 4151691, F01D 136, F03B 500

Patent

active

057095280

ABSTRACT:
A molecular drag compressor includes a rotor disk and a stator that defines a tangential flow channel having an inlet and an outlet. A stationary baffle is disposed in the tangential flow channel adjacent to the outlet. The baffle is spaced from the rotor disk by a gap. A surface of the baffle facing the rotor disk has surface irregularities including peaks for defining the gap and valleys between the peaks for accumulation of particles. The surface irregularities may form a series of grooves. The molecular drag compressor is preferably utilized in a high vacuum pump which includes an axial turbomolecular compressor and a molecular drag compressor. Additional features which limit the effect of particulate accumulation in molecular drag compressors are disclosed.

REFERENCES:
patent: 5238362 (1993-08-01), Carsaro et al.
patent: 5358373 (1994-10-01), Hablanian

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