Turbomolecular pump

Details Turbomolecular pump Turbomolecular pump

1998-08-13

2000-05-16

Lopez, F. Daniel

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

415 90, 415151, 415156, 415157, 417505, 4174234, 251318, F04D 1500, F04B 4922, F04B 1700

Patent

active

060628103

ABSTRACT:
A turbomolecular pump evacuates gas in an apparatus (or a chamber) by means of a rotor having blades and/or spiral grooves which rotates at a high speed. The turbomolecular pump includes a casing housing a rotor and a stator therein, a pumping section comprising the rotor and the stator, a valve element capable of opening or closing an intake port of the casing, and a supporting member for supporting the valve element. The supporting member extends through at least one of the rotor and the stator. The turbomolecular pump further includes an actuating mechanism for actuating the valve element, and the actuating mechanism is provided at a side opposite to the intake port with respect to the rotor.

REFERENCES:
patent: 4193742 (1980-03-01), Fischer et al.
patent: 4588361 (1986-05-01), Saulgeot
patent: 4926648 (1990-05-01), Okumura et al.
patent: 5209631 (1993-05-01), Bernhardt
patent: 5443368 (1995-08-01), Weeks et al.
patent: 5522694 (1996-06-01), Bernhardt et al.
Patent Abstracts of Japan; vol. 18, No. 249 (M-1604), May 12, 1994 & JP 06 033874 A (Ulvac Kuraio KK), *abstract*.

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