Turbomolecular pump with static charge control

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact

Reexamination Certificate

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Details

C415S232000, C417S423400

Reexamination Certificate

active

07404698

ABSTRACT:
The present invention relates to turbomolecular vacuum pumps and an arrangement for reducing or eliminating an accumulated static charge in the rotor caused by an interaction of the rotor with either electrically charged or neutral particles in the pumped media. Electrical charge exchange between the rotor and the electrically grounded stator is effected through a wire or other means of electrical contact, or through charge emission devices such as a field emission tip. In either case, electrostatic charges in the rotor are reduced or eliminated.

REFERENCES:
patent: 6224326 (2001-05-01), Puech
PCT Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration of the International Application No. PCT/US06/32083; Date of mailing: May 2, 2008.
PCT International Search Report of International Application No. PCT/US06/32083; Date of mailing of the International Search Report: May 2, 2008.
PCT Written Opinion of the International Searching Authority of the International Application No. PCT/US06/32083; Date of Mailing: May 2, 2008.

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