Turbomolecular pump having vanes with ceramic and metallic surfa

Details Turbomolecular pump having vanes with ceramic and metallic surfa Turbomolecular pump having vanes with ceramic and metallic surfa

1993-06-03

1994-09-27

Look, Edward K.

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

415200, 4152171, 416241B, 4174234, 4174238, F01D 136

Patent

active

053502752

ABSTRACT:
A turbomolecular pump comprises a casing having an inlet port at one end portion and an outlet port at another end portion, a rotor supported rotatably within the casing, and a stator fixed on an inner wall of the casing. The rotor has rotor vanes which coact with stator vanes on the stator to pump gas molecules from the inlet port to the outlet port. The rotor and stator vanes are arranged in multi-steps and have ceramic surfaces at the steps near the outlet port of the casing and have metallic surface at all other steps, so as to promote the baking efficiency and obtain extremely high vacuums.

REFERENCES:
patent: 2308233 (1943-01-01), Schutte
patent: 4108620 (1978-08-01), Bohme et al.
patent: 5074747 (1991-12-01), Ikegami et al.

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