Turbomolecular pump

Details Turbomolecular pump Turbomolecular pump

1987-03-27

1988-03-22

Garrett, Robert E.

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

F01D 136

Patent

active

047325291

ABSTRACT:
A turbomolecular pump for performing exhaustion by rotating rotors, which pump comprises a blade group consisting of alternately arranged rotors and stators blades and which has a compression ratio raising section in said blade group at a portion on the exhaust port side or an intermediate portion. The compression ratio raising section comprising a rotor whose blade is thicker than a rotor located closer to the suction port side. This turbomolecular pump has good pumping efficiency for lower vacuum range.

REFERENCES:
patent: 969541 (1910-09-01), Matzenik et al.
patent: 2730297 (1956-01-01), Van Dorsten et al.
patent: 3628894 (1971-12-01), Ferguson
patent: 3751908 (1973-08-01), Colwell et al.
patent: 3947193 (1976-03-01), Maurice
patent: 3969039 (1976-07-01), Shoulders
patent: 4023920 (1977-05-01), Bachler et al.
patent: 4111595 (1978-09-01), Backer et al.
patent: 4332522 (1982-06-01), Sawgeot
"Recent State in Turbomolecular Pump Development", Proc. 7th Intern. Vac. Congr. & 3rd Intern. Conf. Solid Surfaces, (Vienna, 1977), pp. 25 through 32.

Affiliated with

Also associated with

Rating

Turbomolecular pump does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Turbomolecular pump, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Turbomolecular pump will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-439511