Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Patent
1987-03-27
1988-03-22
Garrett, Robert E.
Rotary kinetic fluid motors or pumps
Smooth runner surface for working fluid frictional contact
F01D 136
Patent
active
047325291
ABSTRACT:
A turbomolecular pump for performing exhaustion by rotating rotors, which pump comprises a blade group consisting of alternately arranged rotors and stators blades and which has a compression ratio raising section in said blade group at a portion on the exhaust port side or an intermediate portion. The compression ratio raising section comprising a rotor whose blade is thicker than a rotor located closer to the suction port side. This turbomolecular pump has good pumping efficiency for lower vacuum range.
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"Recent State in Turbomolecular Pump Development", Proc. 7th Intern. Vac. Congr. & 3rd Intern. Conf. Solid Surfaces, (Vienna, 1977), pp. 25 through 32.
Kawaguchi Jyuichi
Narita Kiyoshi
Garrett Robert E.
Kwon John T.
Shimadzu Corporation
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