Turbomolecular pump

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact

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F01D 136

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active

047325291

ABSTRACT:
A turbomolecular pump for performing exhaustion by rotating rotors, which pump comprises a blade group consisting of alternately arranged rotors and stators blades and which has a compression ratio raising section in said blade group at a portion on the exhaust port side or an intermediate portion. The compression ratio raising section comprising a rotor whose blade is thicker than a rotor located closer to the suction port side. This turbomolecular pump has good pumping efficiency for lower vacuum range.

REFERENCES:
patent: 969541 (1910-09-01), Matzenik et al.
patent: 2730297 (1956-01-01), Van Dorsten et al.
patent: 3628894 (1971-12-01), Ferguson
patent: 3751908 (1973-08-01), Colwell et al.
patent: 3947193 (1976-03-01), Maurice
patent: 3969039 (1976-07-01), Shoulders
patent: 4023920 (1977-05-01), Bachler et al.
patent: 4111595 (1978-09-01), Backer et al.
patent: 4332522 (1982-06-01), Sawgeot
"Recent State in Turbomolecular Pump Development", Proc. 7th Intern. Vac. Congr. & 3rd Intern. Conf. Solid Surfaces, (Vienna, 1977), pp. 25 through 32.

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