Turbomolecular pump

Details Turbomolecular pump Turbomolecular pump

1996-11-08

1997-11-18

Verdier, Christopher

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

415143, F01D 136, F04D 1904

Patent

active

056881061

ABSTRACT:
A turbomolecular pump comprises a pump body housing a gas inlet and a gas exhaust port and a plurality of pumping assemblies with interleaved rotors and stators located within the pump body. The rotors are secured to a rotating shaft that is supported by at least one rotatable support and driven by a motor. At least one stator of the pumping assemblies is provided with at least one spiral channel adapted to push and eject the gases from an area proximal to the shaft toward an area distal from the shaft and vice versa.

REFERENCES:
patent: 4655678 (1987-04-01), Miki
patent: 5238362 (1993-08-01), Casaro et al.
patent: 5358373 (1994-10-01), Hablanian
patent: 5547338 (1996-08-01), Conrad et al.

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