Turbo-molecular pump, substrate processing apparatus, and...

Details Turbo-molecular pump, substrate processing apparatus, and... Turbo-molecular pump, substrate processing apparatus, and...

2008-03-28

2011-11-08

Edgar, Richard (Department: 3745)

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

C415S117000

Reexamination Certificate

active

08052376

ABSTRACT:
A turbo-molecular pump that enables reliable suppression of attachment of depositions onto component parts thereof. The turbo-molecular pump discharges a deposition-causing gas from a processing chamber. A rotor has a rotor shaft aligned with an exhaust stream. A cylindrical casing houses the rotor therein. A plurality of blade-form rotor blades projects from the rotor orthogonally with respect to the rotor shaft and are divided into a plurality of rotor blade groups. A plurality of blade-form stator blades projects orthogonally with respect to the rotor shaft from a rotor-facing surface and are divided into a plurality of stator blade groups. Gas supply ports are located on an upstream side of the rotor blade group that is located furthest downstream in the exhaust stream, and supply a deposition-suppressing gas which includes gas molecules having a large molecular weight.

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patent: 6224326 (2001-05-01), Puech
patent: 61043297 (1986-03-01), None
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JP 05231369 A Machine Translation. Accessed JPO website Mar. 21, 2011.

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