Turbomolecular vacuum pump

Details Turbomolecular vacuum pump Turbomolecular vacuum pump

1987-04-23

1988-09-06

Garrett, Robert E.

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

415170R, 310 905, 384446, F01D 136

Patent

active

047689218

ABSTRACT:
A turbomolecular vacuum pump having stator blades disposed in a multistage fashion within a casing in an axial direction thereof, and rotor blades which are located between respectively adjacent stator blades and are mounted on an outer periphery of a rotor situated centrally of the casing. A motor rotor is fixed to a rotating member which is formed of the rotor having the rotor blades fixed to the outer periphery, and a motor stator opposite to the motor rotor is arranged so as to construct a drive mechanism for the rotating member. The rotating member is supported at a lower portion thereof by a pivot-type plane bearing, and a magnetic bearing is arranged in such a manner so as to oppose a lower end of the rotor and a supporting member for the rotating member.

REFERENCES:
patent: 3856200 (1974-12-01), Lieb
patent: 4111595 (1978-09-01), Becker et al.
patent: 4196946 (1980-04-01), Lipscomb
patent: 4541772 (1985-09-01), Becker
patent: 4579508 (1986-04-01), Tsumaki et al.
patent: 4609332 (1986-09-01), Miki et al.

Affiliated with

Also associated with

Rating

Turbomolecular vacuum pump does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Turbomolecular vacuum pump, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Turbomolecular vacuum pump will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1603995