Turbomolecular pump

Details Turbomolecular pump Turbomolecular pump

1985-07-24

1988-03-22

Garrett, Robert E.

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

F01D 136

Patent

active

047325305

ABSTRACT:
A turbomolecular pump for evacuating a space by a plurality of turbine grooves located on a rotor and a stator located in face-to-face relationship to the rotor, with the turbine grooves, including rotor grooves on an outer peripheral surface of a rotor extending peripherally at a predetermined angle with respect to the axis of the rotor, and stator grooves on a surface of a stator facing the rotor which extend at the same angle as the rotor grooves but are oriented in an opposite direction to the rotor grooves. The rotor grooves and stator grooves overlap in part as viewed axially of the rotor. A pumping action is performed by surfaces of blades of an axial flow turbomolecular pump and a pumping action is performed by the rotor and the bottom surface of the groove of a helical groove turbomolecular pump, whereby a high compression ratio and a high gas discharge or evacuation speed can be achieved.

REFERENCES:
patent: 1069408 (1913-08-01), Gaede
patent: 1980589 (1934-11-01), Acree
patent: 2918208 (1959-12-01), Becker
patent: 3138318 (1964-06-01), Garnier et al.
patent: 3472518 (1969-10-01), Harlan
patent: 3751908 (1973-08-01), Colwell et al.
patent: 3969039 (1976-07-01), Shoulders
patent: 4270882 (1981-06-01), Luijten et al.

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