Turbomolecular pump

Details Turbomolecular pump Turbomolecular pump

1992-07-21

1993-08-24

Denion, Thomas E.

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

415143, 4151981, F01D 136, F03B 500

Patent

active

052383628

ABSTRACT:
A high vacuum pump comprising an in-line connection on a single drive shaft of an axial turbomolecular compressor and a peripheral compressor where the pump provides better than 10.sup.-7 Pascal inlet when exhausting to atmosphere. The peripheral compressor has a two stage optimized Gaede design which encloses the impellers in a shroud reducing the top and bottom volume surrounding the impellers and providing a large separation pressure drop region between stages of said peripheral compressors to reduce axial leakage.

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patent: 5020969 (1991-06-01), Mase et al.
patent: 5052887 (1991-10-01), Novikov et al.
patent: 5074747 (1991-12-01), Ikegami et al.

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