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Blanks for halftone phase shift photomasks, halftone phase shift

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Blanks for phase shift photomasks, and phase shift photomasks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Block mask and charged particle beam exposure method and apparat

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Block mask making method, block mask and exposure apparatus

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Breakaway registration pins

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Calibration of optical line shortening measurements

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Carbonization process for an etch mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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CD uniformity of chrome etch to photomask process

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Cell projection mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Characterization and synthesis of OPC structures by fourier...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Charge effect and electrostatic damage prevention method on...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Charged beam mask having strut wider than charged beam, with...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Charged particle beam exposure method and mask employed therefor

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Charged particle beam transfer mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Charged-beam exposure mask and charged-beam exposure method

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Charged-particle-beam microlithography masks and methods for...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Charged-particle-beam microlithography methods and reticles for

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Charged-particle-beam pattern-transfer methods and apparatus...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Charged-particle-beam transfer masks and methods of making

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Chelation cleaning process for repairing photomasks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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