Blanks for halftone phase shift photomasks, halftone phase shift
Blanks for phase shift photomasks, and phase shift photomasks
Block mask and charged particle beam exposure method and apparat
Block mask making method, block mask and exposure apparatus
Breakaway registration pins
Calibration of optical line shortening measurements
Carbonization process for an etch mask
CD uniformity of chrome etch to photomask process
Cell projection mask
Characterization and synthesis of OPC structures by fourier...
Charge effect and electrostatic damage prevention method on...
Charged beam mask having strut wider than charged beam, with...
Charged particle beam exposure method and mask employed therefor
Charged particle beam transfer mask
Charged-beam exposure mask and charged-beam exposure method
Charged-particle-beam microlithography masks and methods for...
Charged-particle-beam microlithography methods and reticles for
Charged-particle-beam pattern-transfer methods and apparatus...
Charged-particle-beam transfer masks and methods of making
Chelation cleaning process for repairing photomasks