Removal of line end shortening in microlithography and mask...
Repair method for phase shift mask in semiconductor device
Repair of localized defects in multilayer-coated reticle...
Repair of masks to promote adhesion of patches
Repair of photolithography masks by sub-wavelength...
Repair of reflective photomask used in semiconductor process
Repaired apertured laser metal mask
Resist composition and pattern forming process
Resist underlayer coating forming composition for mask...
Resolution enhancement for alternating phase shift masks
Resolution enhancement method for deep quarter micron...
Resolution-enhancing optical phase structure for a projection il
RET for optical maskless lithography
Reticle
Reticle
Reticle alignment and overlay for multiple reticle process
Reticle and a method for measuring blind setting accuracy using
Reticle and method for measuring rotation error of reticle by us
Reticle and method of design to correct pattern for depth of foc
Reticle and method of fabricating reticle