Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2007-12-04
2007-12-04
Huff, Mark F. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
C382S144000
Reexamination Certificate
active
10810385
ABSTRACT:
A method is disclosed for repairing mask damage defects. After determining topographical information of a defect on a mask, one or more grating repair specifications are determined based on an optical simulation using the topographical information. One or more artificial grating areas are formed on one or more sides of the defect based on the grating repair specification.
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Chang Bin-chang
Kung Li-wei
Lu Ming
Shu King-chang
Duane Morris LLP
Huff Mark F.
Ruggles John
Taiwan Semiconductor Manufacturing Company
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