Calibration of optical line shortening measurements
Characterizing flare of a projection lens
Charged beam drawing method
Charged beam processing apparatus
Charged particle beam exposure compensating proximity effect
Charged particle beam exposure method
Charged particle beam exposure method utilizing subfield proximi
Charged particle beam writing method for determining optimal exp
Charged particle processing for forming pattern boundaries...
Charged-particle beam lithography method
Charged-particle-beam exposure method with temperature-compensat
Charged-particle-beam microlithographic methods for...
Charged-particle-beam microlithography apparatus and methods...
Charged-particle-beam microlithography methods exhibiting...
Charged-particle-beam microlithography methods for exposing...
Charged-particle-beam microlithography methods including correct
Charged-particle-beam microlithography methods including...
Charged-particle-beam projection-exposure method exhibiting aber
Charged-particle-beam transfer methods exhibiting reduced resist
Charged-particle-beam transfer methods utilizing high and low re