Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Reexamination Certificate
2007-02-23
2009-11-03
Wells, Nikita (Department: 2881)
Radiation imagery chemistry: process, composition, or product th
Including control feature responsive to a test or measurement
C430S022000
Reexamination Certificate
active
07611810
ABSTRACT:
A charged beam processing apparatus for processing an object to form structures on the object includes a processing chamber, a multi-charged beam optical system configured to generate a plurality of charged beams, and to converge and to deflect the plurality of charged beams to irradiate the object in the processing chamber with the plurality of charged beams, and a supply port configured to supply a gas into the processing chamber. The multi-charged beam optical system includes (i) a lens array, and (ii) a pattern forming plate configured to select a portion of the lens array to be used to form the structures. The charged beam processing apparatus includes a controller configured to control an exchange of the pattern forming plate in accordance with an arrangement pattern of the structures to be formed on the object.
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Okunuki Masahiko
Ono Haruhito
Tamamori Kenji
Wang Shinan
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Smith Johnnie L
Wells Nikita
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