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Calibration of optical line shortening measurements

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Reexamination Certificate

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Characterizing flare of a projection lens

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Charged beam drawing method

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Charged beam processing apparatus

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Charged particle beam exposure compensating proximity effect

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Charged particle beam exposure method

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Charged particle beam exposure method utilizing subfield proximi

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Charged particle beam writing method for determining optimal exp

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Charged particle processing for forming pattern boundaries...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Charged-particle beam lithography method

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Charged-particle-beam exposure method with temperature-compensat

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Charged-particle-beam microlithographic methods for...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Charged-particle-beam microlithography apparatus and methods...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Charged-particle-beam microlithography methods exhibiting...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Charged-particle-beam microlithography methods for exposing...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Charged-particle-beam microlithography methods including correct

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Charged-particle-beam microlithography methods including...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Charged-particle-beam projection-exposure method exhibiting aber

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Charged-particle-beam transfer methods exhibiting reduced resist

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Charged-particle-beam transfer methods utilizing high and low re

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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