Structure for pattern formation, method for pattern...
Substrate having fine lines, method for manufacturing the...
Sulfonamide compound, polymer compound, resist material and...
Surface barrier silylation of novolak film without photoactive a
Surface smoothing of stereolithographically formed 3-D objects
Surface smoothing of stereolithographically formed 3-D objects
Surface smoothing of stereolithographically formed 3-D objects
Surface-imaging technique for lithographic processes for device
Surface-texture filmwork generation
System and method for contrast enhanced zone plate array...
System and method for developing a photoresist layer with...
System for and method of constructing an alternating...
System to enable photolithography on severe structure...
Technique for making deep microstructures in photoresist
Ternary photoinitiator system for addition polymerization
Textured chamber surface
Thermal reflow photolithographic process
Thermal stabilization of photoresist images
Thermally stabilized photoresist images
Thermally stabilized photoresist images