Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate
2008-12-17
2010-02-23
Davis, Daborah Chacko (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
C430S396000, C430S394000, C430S311000
Reexamination Certificate
active
07666580
ABSTRACT:
A lithography system is disclosed that includes an array of focusing elements for directing focused illumination toward a recording medium, and a reversible contrast-enhancement material disposed between the recording medium and the array of focusing elements.
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Menon Rajesh
Smith Henry I.
Chacko Davis Daborah
Gauthier & Conners LLP
Massachusetts Institute of Technology
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