Charged-particle beam lithography apparatus and device...

Charged-particle beam system

Charged-particle beam system

Charged-particle beam system

Charged-particle detectors and mass spectrometers employing the

Charged-particle exposure apparatus

Charged-particle optical system

Charged-particle-beam microlithography apparatus and methods...

Charged-particle-beam optical system

Charged-particle-beam projection apparatus and transfer methods

Charged-particle-beam projection optical system

Charged-particle-beam projection-lens system exhibiting...

Chromatic aberration corrector for charged particles and...

Chromatically compensated particle-beam column

Chromatically corrected deflecting device for particle-beam equi

Circuit arrangement for a detector for ionizing radiation

Circuit arrangement for an X-ray generator

Circuit for image displacement in a particle beam apparatus inde

Circular, confined distribution for charged particle beams

Collective field accelerator