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Electron microscope

Radiant energy – With charged particle beam deflection or focussing – With detector
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Electron microscope

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Electron microscope

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Electron microscope aperture system

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Electron microscope phase enhancement

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Electron microscope with an asymmetrical immersion lens

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Electron optical component

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Electron optical lens system with a slot-shaped aperture...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Electron optical system array, charged-particle beam...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Electron optical system array, method of fabricating the...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Electron optical system array, method of manufacturing the...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Electron optical system, charged-particle beam exposure...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Electron optics for multi-beam electron beam lithography tool

Radiant energy – With charged particle beam deflection or focussing – With target means
Reexamination Certificate

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Electron projection lithography apparatus using secondary...

Radiant energy – With charged particle beam deflection or focussing – With target means
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Electron projection microfabrication system

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Electron radiation dose tailoring by variable beam pulse generat

Radiant energy – With charged particle beam deflection or focussing – With target means
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Electron-beam exposure system for reduced distortion of electron

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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Electron-optical corrector for eliminating third-order...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Electron-optical lens arrangement with an axis that can be...

Radiant energy – With charged particle beam deflection or focussing – With target means
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Electron-optical system exhibiting reduced aberration

Radiant energy – With charged particle beam deflection or focussing – With target means
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