Electron microscope

Details Electron microscope Electron microscope

1975-12-11

1978-01-31

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

With detector

250311, H01J 3726

Patent

active

040717658

ABSTRACT:
In an electron beam apparatus corrections are made for vibrations and field disturbances which cause a lateral beam shift. A detector is arranged in an intermediate image near the beam path and a signal derived therefrom is used for controlling a beam deflection device. When a second beam deflection device is added, the undesired deflection in a scanning electron microscope can be distinguished from the deflection caused by the scanning.

REFERENCES:
patent: 3576438 (1971-04-01), Pease
patent: 3767927 (1973-10-01), Rus et al.
patent: 3795809 (1974-03-01), Takashima
patent: 3872305 (1975-03-01), Koike
patent: 3927321 (1975-12-01), Welter

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