Electron microscope with an asymmetrical immersion lens

Details Electron microscope with an asymmetrical immersion lens Electron microscope with an asymmetrical immersion lens

1989-08-31

1992-01-07

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250396R, 250398, H01J 320

Patent

active

050794280

ABSTRACT:
A magnetic electron focusing lens including a first pole piece, from a back side of which low-energy electrons are injected, and a second pole piece located on a front side of the first pole piece. The first and second pole pieces are coupled to form a single magnetic circuit. The first pole piece is shaped to maximize the magnetic field at a its front side at a peak much closer to the first then to the second pole piece. The specimen is located between the first and second pole pieces near the peak of the magnetic field.

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J. B. Pawley, "Low Voltage Scanning Electron Microscopy," EMSA Bulletin, 1988, vol. 18, pp. 61-64.
Z. Shao, "New Lens for a Low-Voltage Scanning Electron Microscope," Review of Scientific Instruments, 1988, vol. 59, pp. 1985-1989.
M. Szilagyi, "Electron and Ion Optics," Plenum Press, New York, 1988, pp., 420-421.

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