Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2005-03-29
2005-03-29
Nguyen, Kiet T. (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S492220
Reexamination Certificate
active
06872952
ABSTRACT:
This invention relates to an electron optical system array having a plurality of electron lenses. The electron optical system array includes a plurality of electrode structures which are arranged along the paths of a plurality of charged-particle beams and have pluralities of apertures on the paths of the plurality of charged-particle beams. At least one of the plurality of electrode structures includes a substrate having a plurality of apertures for transmitting the plurality of charged-particle beams, and a plurality of electrodes extending from the side surfaces of the plurality of apertures to the peripheries of the plurality of apertures. At least the surface of the substrate is insulated.
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Maehara Hiroshi
Ono Haruhito
Shimada Yasuhiro
Yagi Takayuki
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