Electron optical system array, method of fabricating the...

Details Electron optical system array, method of fabricating the... Electron optical system array, method of fabricating the...

2005-03-29

2005-03-29

Nguyen, Kiet T. (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S492200

Reexamination Certificate

active

06872950

ABSTRACT:
This invention relates to an electron optical system array having a plurality of electron lenses. The electron optical system array includes a plurality of electrodes arranged along the paths of a plurality of charged-particle beams. Each of the plurality of electrodes has a membrane in which a plurality of apertures are formed on the paths of the plurality of charged-particle beams, and a support portion which supports the membrane. At least two of the plurality of electrodes are arranged to form a nested structure.

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