Apparatus and method for specimen fabrication
Apparatus and method for uniform ion dose control
Apparatus and method for uniformly irradiating a strand
Apparatus and method of ion beam processing
Apparatus and method preventing radiation induced degradation of
Apparatus and method using fractionated irradiation to...
Apparatus and method using irradiation to harden metal
Apparatus and method using low-voltage and/or low-current scanni
Apparatus and methods for blocking highly scattered charged...
Apparatus and methods for charged-particle-beam...
Apparatus and methods for electron beam irradiation
Apparatus and methods for ion beam implantation
Apparatus and methods for ion beam implantation using ribbon...
Apparatus and methods for ion implantation
Apparatus and methods for ion implantation
Apparatus and methods for ion implantation
Apparatus and methods for patterning a reticle blank by...
Apparatus and methods for reducing Coulombic blur in...
Apparatus and methods for systematic non-uniformity...
Apparatus and methods for two-dimensional ion beam profiling