Radiant energy – Irradiation of objects or material
Patent
1984-12-19
1987-02-03
Anderson, Bruce C.
Radiant energy
Irradiation of objects or material
250504R, G21G 100
Patent
active
046410333
ABSTRACT:
An apparatus and method for maintaining an optical element at a sufficiently high temperature during transmission of radiation by the optical element to prevent radiation degradation of the optical element by an increase in the absorption of at least one wavelength of the radiation. The material of the optical element is such that the absorption of the wavelength(s) concerned temporarily decreases upon annealing the optical element. The optical element may be kept at the temperature required by a wide variety of heating techniques, including gas convection heating, direct contact heating, and radiant heating. The heated optical element may be employed in optical systems for transmitting radiation from a source of radiation to a target to be exposed to this radiation.
REFERENCES:
patent: 1791254 (1931-02-01), Brockdorff
patent: 2442913 (1948-06-01), Abrams et al.
patent: 3111570 (1963-11-01), Strang et al.
patent: 3495259 (1970-02-01), Rocholl et al.
patent: 4232228 (1980-11-01), Reich et al.
patent: 4355861 (1982-10-01), Sebald
patent: 4523806 (1985-06-01), Kojima et al.
patent: 4532427 (1985-07-01), Matthews et al.
Multilayer-Resist Lithography, pp. 49-55, Pieter S. Burggraaf.
Multilayer Resists for Fine Line Optical Lithography, pp. 155-160, E. Ong, E. L. Hu.
A Practical Multilayer Resist Process for 1 .mu.m Lines, (5 pages), Thomas Batchelder & Clifford Takemoto.
Oxygen-Associated Trapped-Hole Centers in High-Purity Fused Silicas, pp. 313-326, M. Stapelbroek, D. L. Griscom, E. J. Friebele and G. H. Sigel, Jr.
Point Defects and Radiation Damage Processes in .alpha.-Quartz, pp. 98-109, David L. Griscom.
Effects of Ionizing Radiation on Amorphous Insulators, pp. 63-72, D. L. Griscom and E. J. Friebele.
Sources and Applications of Ultraviolet Radiation, p. 182, Roger Phillips.
Petelin Andrei N.
Sharp Celia M.
Ury Michael G.
Wooden Gene R.
Anderson Bruce C.
Fusion Systems Corporation
Guss Paul A.
LandOfFree
Apparatus and method preventing radiation induced degradation of does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus and method preventing radiation induced degradation of, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method preventing radiation induced degradation of will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1092508