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Gantry with an ion-optical system

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate

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Gantry, particle therapy system, and method for operating a...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Gas bearings for use with vacuum chambers and their...

Radiant energy – Irradiation of objects or material
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Gas cluster ion beam smoother apparatus

Radiant energy – Irradiation of objects or material
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Gas delivery for ion beam deposition and etching

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Gas flow restricting cathode system for ion implanter and...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Gas flushing system for use in lithographic apparatus

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Gas flushing system for use in lithographic apparatus

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Gas flushing system with recovery system for use in...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Gas shower, lithographic apparatus and use of a gas shower

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Gas supply unit, gas supply method and exposure system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Gas target device

Radiant energy – Irradiation of objects or material
Patent

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Gas-shield electron-beam gun for thin-film curing application

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Generator for pulsed electron beams

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Geometric compensation method for charged particle beam...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Glass-like insulator for electrically isolating electrodes...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Grey-splice algorithm for electron beam lithography post-process

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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