4. Radiant energy
  5. Irradiation of objects or material
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Parallel electron beam lithography stamp (PEBLS)

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Parallel multi-electron beam lithography for IC fabrication...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Parametric control in pulsed light sterilization of packages and

Radiant energy – Irradiation of objects or material
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Part for ion implantation device

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Partial ion implantation apparatus and method using bundled...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Particle accelerator for radiotherapy by means of ion beams

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Particle beam accelerator

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Particle beam current monitoring technique

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Particle beam generator

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Particle beam irradiation apparatus

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Particle beam irradiation apparatus, treatment planning...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Particle beam irradiation apparatus, treatment planning...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Particle beam irradiation apparatus, treatment planning...

Radiant energy – Irradiation of objects or material
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Particle beam irradiation apparatus, treatment planning...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Particle beam irradiation apparatus, treatment planning...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Particle beam irradiation equipment and particle beam...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Particle beam irradiation method using depth and lateral...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Particle beam irradiation system

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Particle beam irradiation system

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Particle beam irradiation system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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