Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2011-08-02
2011-08-02
Kim, Robert (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S492100, C250S307000, C250S309000, C250S310000, C250S311000
Reexamination Certificate
active
07989782
ABSTRACT:
A specimen fabricating apparatus comprises: a specimen stage, on which a specimen is placed; a charged particle beam optical system to irradiate a charged particle beam on the specimen; an etchant material supplying source to supply an etchant material, which contains fluorine and carbon in molecules thereof, does not contain oxygen in molecules thereof, and is solid or liquid in a standard state; and a vacuum chamber to house therein the specimen stage. A specimen fabricating method comprises the steps of: processing a hole in the vicinity of a requested region of a specimen by means of irradiation of a charged particle beam; exposing the requested region by means of irradiation of the charged particle beam; supplying an etchant material, which contains fluorine and carbon in molecules thereof, does not contain oxygen in molecules thereof, and is solid or liquid in a standard state, to the requested region as exposed; and irradiating the charged particle beam on the requested region as exposed.
REFERENCES:
patent: 5872061 (1999-02-01), Lee et al.
patent: 6042738 (2000-03-01), Casey et al.
patent: 6120697 (2000-09-01), Demmin et al.
patent: 6211527 (2001-04-01), Chandler
patent: 6268608 (2001-07-01), Chandler
patent: 6538254 (2003-03-01), Tomimatsu et al.
patent: 6570170 (2003-05-01), Moore
patent: 6629348 (2003-10-01), Skorupski et al.
patent: 6710338 (2004-03-01), Gerlach et al.
patent: 6727178 (2004-04-01), Saitou et al.
patent: 6800210 (2004-10-01), Patel et al.
patent: 6828566 (2004-12-01), Tomimatsu et al.
patent: 6843927 (2005-01-01), Naser-Ghodsi
patent: 6881955 (2005-04-01), Lu et al.
patent: 6888136 (2005-05-01), Geurts et al.
patent: 7015483 (2006-03-01), Suzuki et al.
patent: 7041224 (2006-05-01), Patel et al.
patent: 7095021 (2006-08-01), Shichi et al.
patent: 7176458 (2007-02-01), Tomimatsu et al.
patent: 7189332 (2007-03-01), Patel et al.
patent: 7326445 (2008-02-01), Kaito
patent: 7397051 (2008-07-01), Tomimatsu et al.
patent: 7482603 (2009-01-01), Tomimatsu et al.
patent: 2002/0166976 (2002-11-01), Sugaya et al.
patent: 2003/0000921 (2003-01-01), Liang et al.
patent: 2003/0098288 (2003-05-01), Mori et al.
patent: 2003/0183776 (2003-10-01), Tomimatsu et al.
patent: 2005/0045276 (2005-03-01), Patel et al.
patent: 2005/0066899 (2005-03-01), Fukuda et al.
patent: 2007/0145301 (2007-06-01), Tomimatsu et al.
patent: 2007/0293644 (2007-12-01), Morikawa et al.
patent: 2008/0035607 (2008-02-01), O'Hara et al.
patent: 02240198 (1990-09-01), None
patent: 3216881 (2001-08-01), None
patent: 3350374 (2002-09-01), None
patent: 2005-17298 (2005-01-01), None
Fukuda Muneyuki
Shichi Hiroyasu
Takahashi Miyuki
Tomimatsu Satoshi
Hitachi High-Technologies Corporation
Kim Robert
Logie Michael J
Mattingly & Malur, PC
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