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System and method for multi-wafer scanning in ion implanters

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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System and method for multiple particle therapy

Radiant energy – Irradiation of objects or material
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System and method for neutralizing an ion beam using water vapor

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System and method for optimizing placement of dopant upon semico

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System and method for passing high energy particles through...

Radiant energy – Irradiation of objects or material
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System and method for passing particles on selected areas on...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System and method for producing oscillating magnetic fields in w

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System and method for proximity effect correction in imaging...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System and method for reducing charged particle contamination

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System and method for regulating delivered radiation in a radiat

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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System and method for removing particles entrained in an ion...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System and method for serial ion implanting productivity...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System and method for setecing neutral particles in an ion bean

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System and method for uniformly implanting a wafer with an...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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System and method for using areas near photo global...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System and method of controlling broad beam uniformity

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System and method of performing uniform dose implantation...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System and methods for wafer charge reduction for ion implantati

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System and process for inspecting and repairing an original

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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System for controlling ion implantation dosage in electronic mat

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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