Method and apparatus for broad beam ion implantation

Method and apparatus for charged particle beam exposure

Method and apparatus for charged particle beam exposure

Method and apparatus for cleaning a glass substrate for a...

Method and apparatus for controlling a gas cluster ion beam...

Method and apparatus for controlling a workpiece in a vacuum cha

Method and apparatus for controlling a workpiece in a vacuum...

Method and apparatus for controlling beam current uniformity...

Method and apparatus for controlling charged particle beams in c

Method and apparatus for controlling ion implantation during...

Method and apparatus for controlling ion implantation during...

Method and apparatus for controlling ion implantation during...

Method and apparatus for controlling the rate of emission of ele

Method and apparatus for cooling a reticle during...

Method and apparatus for correcting defects of X-ray mask

Method and apparatus for correcting multipole aberrations of...

Method and apparatus for creating a topography at a surface

Method and apparatus for curing coating materials

Method and apparatus for curing, a coating on a substrate

Method and apparatus for deflecting charged particles