Method and apparatus for creating a topography at a surface

Details Method and apparatus for creating a topography at a surface Method and apparatus for creating a topography at a surface

2006-06-29

2008-11-11

Berman, Jack I (Department: 2881)

Radiant energy

Irradiation of objects or material

C250S492200, C250S492210, C250S492220, C250S492230, C250S492300, C250S491100, C250S309000, C250S307000, C250S310000

Reexamination Certificate

active

07449699

ABSTRACT:
Methods and apparatus whereby an optical interferometer is utilized to monitor and provide feedback control to an integrated energetic particle column, to create desired topographies, including the depth, shape and/or roughness of features, at a surface of a specimen. Energetic particle columns can direct energetic species including, ions, photons and/or neutral particles to a surface to create features having in-plane dimensions on the order of 1 micron, and a height or depth on the order of 1 nanometer. Energetic processes can include subtractive processes such as sputtering, ablation, focused ion beam milling and, additive processes, such as energetic beam induced chemical vapor deposition. The integration of interferometric methods with processing by energetic species offers the ability to create desired topographies at surfaces, including planar and curved shapes.

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