Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Patent
1991-04-29
1992-06-30
Berman, Jack I.
Radiant energy
Irradiation of objects or material
Ion or electron beam irradiation
2504922, 250398, 250396R, 250396ML, H01J 37304
Patent
active
051265753
ABSTRACT:
A single aperture ion source is used to produce a ribbon shaped ion beam through which a targer may be transported. At an aperture of the ion source the ion beam converges in a vertical direction and diverges in a horizontal direction. The ion beam is passed through the poles of an analyzing magnet. A waist of the ion beam in the vertical direction occurs at the analyzing magnet. The analyzing magnet causes the ion beam to converge in the horizontal direction. Immediately before the ion beam strikes the target, the ion beam is passed through a focussing magnet which renders the ion beam trajectories substantially parallel. Between the ion source and the target, the ion beam may be passed through one or more resolving slits, as necessary, to trim the ion beam and assure that a focused, uniform beam reached the target. At the target, the analyzing magnet projects an inverted image of the aperture of the ion source. Further, a cross section of the ion beam is in the shape of a ribbon, the length of the ribbon being wider than the target. Using a conveyer the target is passed through the ion beam resulting in a uniform implantation of ions.
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Applied Materials Inc.
Berman Jack I.
Nguyen Kiet T.
Weller Douglas L.
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