Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate
2007-12-04
2010-11-02
Berman, Jack I (Department: 2881)
Radiant energy
Irradiation of objects or material
Ion or electron beam irradiation
C250S492100, C250S492200, C250S492210
Reexamination Certificate
active
07825389
ABSTRACT:
Methods and apparatus for controlling a gas cluster ion beam formed from a plurality of process gases in a gas mixture. The methods and apparatus involve measuring gas analysis data relating to the composition of the gas mixture and modifying the irradiation of the workpiece in response to the detected parameter. The gas analysis data can be derived from samples of the composition of the gas mixture flowing from a gas source to the gas cluster ion beam apparatus or samples of the residual gases inside the vacuum vessel of the gas cluster ion beam apparatus.
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Dykstra Jerald P.
Gwinn Matthew C.
Hautala John J.
Berman Jack I
Chang Hanway
TEL Epion Inc.
Wood Herron & Evans LLP
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