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Charged-particle-beam pattern-transfer apparatus and methods

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle-beam pattern-transfer methods and apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle-beam projection method and apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle-beam projection methods

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle-beam projection-exposure apparatus and...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle-beam projection-exposure apparatus with focus a

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle-beam projection-exposure methods and...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle-beam projection-microlithography apparatus and

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charging control and dosimetry system for gas cluster ion beam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Circuit pattern forming apparatus using MU-STM

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Circuits and methods for electron-beam control

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Circular accelerator, operation method thereof, and semiconducto

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Clean room arrangement for electron beam lithography

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Coated nanotube surface signal probe

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Coated nanotube surface signal probe and method of attaching...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Cold light UV irradiation device

Radiant energy – Irradiation of objects or material
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Collector unit with a reflective element for illumination...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Collector with fastening devices for fastening mirror shells

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Collector with fastening devices for fastening mirror shells

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Collimated x-ray source for x-ray lithographic system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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