Charged-particle-beam pattern-transfer apparatus and methods
Charged-particle-beam pattern-transfer methods and apparatus
Charged-particle-beam projection method and apparatus
Charged-particle-beam projection methods
Charged-particle-beam projection-exposure apparatus and...
Charged-particle-beam projection-exposure apparatus with focus a
Charged-particle-beam projection-exposure methods and...
Charged-particle-beam projection-microlithography apparatus and
Charging control and dosimetry system for gas cluster ion beam
Circuit pattern forming apparatus using MU-STM
Circuits and methods for electron-beam control
Circular accelerator, operation method thereof, and semiconducto
Clean room arrangement for electron beam lithography
Coated nanotube surface signal probe
Coated nanotube surface signal probe and method of attaching...
Cold light UV irradiation device
Collector unit with a reflective element for illumination...
Collector with fastening devices for fastening mirror shells
Collector with fastening devices for fastening mirror shells
Collimated x-ray source for x-ray lithographic system