Apparatus and method for reducing heating of a workpiece in...

Apparatus and method for reducing implant angle variations...

Apparatus and method for repairing resist latent images

Apparatus and method for repairing resist latent images

Apparatus and method for specimen fabrication

Apparatus and method for uniform ion dose control

Apparatus and method of ion beam processing

Apparatus and method using low-voltage and/or low-current scanni

Apparatus and methods for charged-particle-beam...

Apparatus and methods for ion beam implantation

Apparatus and methods for ion beam implantation using ribbon...

Apparatus and methods for ion implantation

Apparatus and methods for ion implantation

Apparatus and methods for ion implantation

Apparatus and methods for reducing Coulombic blur in...

Apparatus and methods for systematic non-uniformity...

Apparatus and methods for two-dimensional ion beam profiling

Apparatus and methods of controlling surface charge and focus

Apparatus and system for controlling ion ribbon beam...

Apparatus and techniques for scanning electron beam based...