Apparatus and system for controlling ion ribbon beam...

Details Apparatus and system for controlling ion ribbon beam... Apparatus and system for controlling ion ribbon beam...

2009-12-24

2011-11-01

Souw, Bernard E (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492230, C250S505100, C250S251000

Reexamination Certificate

active

08049192

ABSTRACT:
An ion beam blocking array configured to provide a mechanical means for adjusting the beam current profile of an ion ribbon beam by blocking the beam current at one or more locations across the ribbon beam. The ion beam blocking array includes a drive motor, an axle connected to the drive motor and a plurality of profile wheels disposed along the axle where each of the profile wheels is configured to rotate when the axle rotates. Each of the profile wheels is disposed across a width of the ribbon beam and has a position corresponding to a location along the width of the beam.

REFERENCES:
patent: 5350926 (1994-09-01), White et al.
patent: 5811823 (1998-09-01), Blake et al.
patent: 2003/0197132 (2003-10-01), Keum et al.
patent: 2004/0099818 (2004-05-01), Jun et al.
patent: 2005/0247889 (2005-11-01), Yoon

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