LandOfFree - US Patents - Listing for Radiant energy,Irradiation of objects or material,Irradiation of semiconductor devices

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Aluminum implantation method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices

Reexamination Certificate

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Angular aperture shaped beam system and method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices

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Anti-electron reflector arrangement

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices

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Aperture diaphragm for a lithography apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices

Patent

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Aperture for use in electron beam system for pattern writing

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices

Patent

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Apparatus and method applied to exposure by charged beam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices

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Apparatus and method for charged particle filtering and ion...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices

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Apparatus and method for charged-particle beam writing

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices

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Apparatus and method for controlled particle beam manufacturing

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices

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Apparatus and method for controlled particle beam manufacturing

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices

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Apparatus and method for controlled particle beam manufacturing

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices

Reexamination Certificate

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Apparatus and method for controlled particle beam manufacturing

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices

Reexamination Certificate

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Apparatus and method for controlled particle beam manufacturing

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices

Reexamination Certificate

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Apparatus and method for controlling a beam shape

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices

Reexamination Certificate

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